Characterization of the refractive index of lateral-oxidation-formed AlxOy by spectroscopic ellipsometry

被引：0
|
作者：
Kitatani, Takeshi [1 ]
Kondow, Masahiko [1 ]
机构：
[1] RWCP OIH Laboratory, c/o Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 5 A期
关键词：
Spectroscopic ellipsometry (SE) - Vertical-cavity surface-emitting lasers (VCSEL);
D O I：
10.1143/jjap.41.2954
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：2954 / 2957
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