Accurate analysis of top gate effect of a typical triple-gate fin-type FET using three-dimensional device simulation

被引:0
作者
Tsutsumi, Toshiyuki [1 ]
Nakamura, Takeshi [2 ]
Yokoyama, Norihiro [1 ]
Fukuoka, Shota [1 ]
机构
[1] Department of Computer Science, School of Science and Technology, Meiji University, Kawasaki,214-8571, Japan
[2] Recomm Co., Ltd., Japan
来源
Japanese Journal of Applied Physics | 2016年 / 55卷 / 06期
关键词
616.1 Heat Exchange Equipment and Components - 701.1 Electricity: Basic Concepts and Phenomena - 714.2 Semiconductor Devices and Integrated Circuits;
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摘要
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