Method of nanometer measurement using multi-wavelength interferometry

被引：0
|
作者：
Cheng, Xiaohui [1 ]
Li, Dacheng [1 ]
Zhao, Yang [1 ]
机构：
[1] Tsinghua Univ, Beijing, China
来源：
Guangxue Jishu/Optical Technique | 2000年 / 26卷 / 04期
关键词：
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中图分类号：
学科分类号：
摘要：
Optical variables measurement
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页码：313 / 315
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