Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist

被引：0
|
作者：
Lee, Jaekul [1 ]
Shin, Hyunjung [2 ]
Kim, Sungdong [3 ]
Hong, Seungbum [3 ]
Chung, Juhwan [3 ]
Park, Hongsik [3 ]
Moon, Jooho [1 ]
机构：
[1] Department of Ceramic Engineering, Yonsei University, Seoul 120-749, Korea, Republic of
[2] Sch. of Adv. Materials Engineering, Kookmin University, Seoul 136-702, Korea, Republic of
[3] Samsung Adv. Inst. of Technology, P.O. Box 111, Suwon 440-600, Korea, Republic of
来源：
| 2003年 / Japan Society of Applied Physics卷 / 42期
关键词：
Microfabrication process - Spring constant;
D O I：
10.1143/jjap.42.l1171
中图分类号：
学科分类号：
摘要：
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