High-Sensitivity Flexible Strain Sensor with the Inverted Pyramid Microstructure Array Based on Stress-Induced Regular Linear Cracks

被引：0
|
作者：
Chen, Ming [1 ]
Ding, Zhi [1 ]
Wang, Weidong [1 ]
Hou, Baoyin [1 ,2 ]
Che, Lufeng [1 ,2 ,3 ]
机构：
[1] College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou,310027, China
[2] Zhejiang Key Laboratory of Advanced Micro-nano Transducers Technology, Center for Microelectronics, Shaoxing Institute, Zhejiang University, Shaoxing,312035, China
[3] State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou,310058, China
来源：
Journal of Electronic Materials | 2024年
关键词：
Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Conductive films - Microcracking - Microcracks - Residual stresses - Strain gages - Stress analysis - Stress concentration
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