Lateral shearing interferometer for the wavefront test of small beam

被引：0
作者：
Liu, Lei [1 ,2 ]
Zeng, Aijun [1 ]
Zhu, Linglin [1 ]
Huang, Huijie [1 ]
机构：
[1] Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
[2] University of Chinese Academy of Sciences
来源：
Zhongguo Jiguang/Chinese Journal of Lasers | 2014年 / 41卷 / 01期
关键词：
Coherence optics; Equal optical path difference; Interferometer; Lateral shearing; Wavefront testing;
D O I：
10.3788/CJL201441.0108003
中图分类号：
学科分类号：
摘要：
A lateral shearing interfeometer for the wavefront test of small beam is proposed. The interferometer is composed of a polarization beam splitter, a crystal plate, a quarter-wave plate, a mirror and a CCD detector. The polarization beam splitter is used both as a polarizer and an analyzer. The interferometer can test wavefront of low coherent light for its equal optical path length. Small shearing amount can be obtained by the crystal plate whose optical axis is parallel to its surface, thus it's suitable for the wavefront test of small beam. The shearing amount can be continuously adjusted by rotating the crystal plate. Using ASAP software, the lateral shearing interferometer is simulated. The simulation result is well coincident with the theoretical derivation. In the experiments, the interferometer is built to obtain interferogram by rotating the crystal plate. The experimental result is well coincident with the simulation result. The usefulness of the interferometer is verified.
引用
收藏
相关论文
共 11 条
  • [1] Ma C., Luo H., Wang J., Et al., Surface erroer measurement of plane mirrors based on oblique incidence, Laser & Optoelectronics Progress, 48, 7, (2011)
  • [2] Zhao Q., Jiang Z., He Y., Et al., Development and calibration of a radial-shearing interferometer, Laser & Optoelectronics Progress, 49, 4, (2012)
  • [3] Zheng X., Wang Y., Wang Q., Et al., Measurement of optical inhomogeneity with dual-wavelength phase-shifting interferometry, Chinese J Lasers, 38, s1, (2011)
  • [4] Liu D., Yang Y., Wang L., Et al., Real time diagnosis of transient pulse laser with high repetition by radial shearing interferometer, Appl Opt, 46, 34, pp. 8305-8314, (2007)
  • [5] Jiang Z., Xi F., Hou J., Et al., Optical effects measurements in a low velocity turbulent jet, Chinese J Lasers, 31, 8, pp. 943-946, (2004)
  • [6] Luan Z., Liu L., Liu D., Et al., Double-shearing wavefront testing, Acta Optica Sinica, 24, 10, pp. 1417-1420, (2004)
  • [7] Zeng X., Ding J., Liang P., Et al., Wave front reconstruction from shearing interferograms using least square fitting, Acta Optica Sinica, 25, 3, pp. 335-340, (2005)
  • [8] Luan Z., Wang L., Zhou Y., Et al., Large-aperture lateral double shearing laser interferometer, Chinese J Lasers, 37, s1, pp. 273-276, (2010)
  • [9] Murty M.V.R.K., The use of a single plane parallel plate as a lateral shearing interfeometer with a visible gas laser source, Appl Opt, 3, 4, pp. 531-534, (1964)
  • [10] Zheng X., Guo X., Xiong X., Et al., Real-time inspection of collimated light beam with small aperture, Journal of Jilin University, 44, 2, pp. 246-249, (2006)
12