Characterization of threading edge dislocation in 4H-SiC by X-ray topography and transmission electron microscopy

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20141217488073

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(1) Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta-ku, Nagoya 456-8587, Japan; (2) Toyota Motor Corporation, 1200 Mishuku, Susono, Shizuoka 410-1193, Japan; (3) Toyota Central Research and Development Laboratories Incorporated, Nagakute, Aichi 480-1192, Japan; (4) The University of Tokyo, 2-11-16 Yayoi, Bunkyo-ku, Tokyo 113-8656, Japan | 1600年 / Cree Inc.; et al; Mitsubishi Electric Corporation; Research Institute for Applied Sciences; The Japan Society of Applied Physics; Tokyo Electron Limited卷 / Trans Tech Publications Ltd期

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103223

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页码：778 / 780