Extendibility of Ta2O5 metal-insulator-metal capacitor using Ru electrode

被引：0
|
作者：
Tsuzumitani, Akihiko [1 ]
Okuno, Yasutoshi [1 ]
Shibata, Jun [1 ]
Shimizu, Tadami [1 ]
Yamamoto, Kazuhiko [1 ]
Mori, Yoshihiro [1 ]
机构：
[1] ULSI Proc. Technol. Devmt. Center, Semiconductor Company, Matsushita Electronics Corporation, 19 Nishikujo-kasugacho, Minami-ku, Kyoto 601-8413, Japan
来源：
| 2000年 / JJAP, Tokyo, Japan卷 / 39期
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