Relationship between mass loading and frequency temperature characteristics of AT-cut quartz resonators

被引：0

作者：

Gong, Xun ^{[1
]}

Sekimoto, Hitoshi ^{[1
]}

Goka, Shigeyoshi ^{[1
]}

Watanabe, Yasuaki ^{[1
]}

机构：

[1] Graduate School of Engineering, Tokyo Metropolitan University, Hachioji, Tokyo 192-0397

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2003年 / 42卷 / 7 A期

关键词：

Apparent cut angle; AT-cut quartz resonator; Electrode materials; Finite strain effect; Frequency temperature characteristics; Mass loading; Thermally induced strain bias; Third-order elastic constants;

D O I：

10.1143/jjap.42.4542

中图分类号：

学科分类号：

摘要：

Past experiments indicated that the mass loading (R) results in a shift of the apparent orientation angle of the quartz plate and this shift is proportional to the thickness of the metal film and the difference between the thermal expansion coefficients (α) of the electrode and the substrate. In this study, first we make a new model that includes the anisotropy of quartz based on the model of EerNisse [Proc. 29th Annu. Freq. Control Symp., 1975, p. 1] to obtain the thermally induced strain bias. Then, we deduce a simple relationship for the thickness shear vibrations from Lee and Tang's [IEEE Trans. Ultrason. Ferroelect. & Freq. Control 34 (1987) 659] theory of small-magnitude vibration superposing on the bias strain field. A new method which can enable a strict analysis of the phenomenon is thus developed. The simulation of several kinds of metal films is performed. The results agree well with the above-mentioned experimental results.

引用

页码：4542 / 4545

页数：3

共 16 条

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[2]

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