Effects of substrate temperature on properties for transparent conducting ZnO:Al films on organic substrate deposited by r.f. sputtering

被引：0

作者：

Zhang, Deheng ^{[1
]}

Zhang, Dejun ^{[1
]}

Wang, Qingpu ^{[1
]}

Yang, Tianlin ^{[1
]}

机构：

[1] Dept. of Phys., Shandong Univ., Ji'nan 250100, China

来源：

Journal of Materials Science and Technology | 2001年 / 17卷 / 05期

关键词：

Aluminum - Doping (additives) - Sputter deposition - Thermal effects - Zinc oxide;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

This paper presents the substrate temperature dependence of opto-electrical properties for transparent conducting Al-doped ZnO films prepared on polyisocyanate (PI) substrates by r.f. sputtering. Polycrystalline ZnO:Al films with good adherence to the substrates having a (002) preferred orientation have been obtained with the resistivity in the range from 4.1×10-3 to 5.3×10-4Ω&middotcm. The carrier density is more than 2.6×1020cm-3 and the Hall mobility is in the range between 5.78 and 13.11 cm2/V/s for films. The average transmittance reaches 75% in the visible spectrum. The quality of obtained films depends on the substrate temperature during film fabrication.

引用

页码：517 / 520