Growth of amorphous alloy films by ion beam assisted deposition

被引：0

作者：

Pan, Feng ^{[1
]}

Zeng, Fei ^{[1
]}

Zhao, Bin ^{[1
]}

机构：

[1] Dept. of Mat. Sci. and Eng., Tsinghua Univ., Beijing 100084, China

来源：

Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology | 2002年 / 22卷 / SUPPL.期

关键词：

Amorphous alloys - Ion beam assisted deposition - Morphology - Stoichiometry;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Some amorphous binary alloy films were grown by ion beam assisted deposition. The morphology and stoichiometry of the films were studied by transmission electron microscopy. Amorphous phase was found in the films of the selected binary alloy systems. The results show that phase formation of the films is strongly affected by the formation heat, crystalline structures of the metal components and ion beam energy. Observation of some new meta-stable phases and phase evolution indicates that the phase formation mechanism of the films differs significantly from that of the films grown by ion mixing of multilayers.

引用

页码：1 / 4