Design of six-axis force piezoelectric sensor with spoke structure

被引:0
|
作者
Xu X.-S. [1 ]
Li Y.-J. [1 ]
Wang G.-C. [1 ]
Sun X. [1 ]
Sun Y. [1 ]
机构
[1] School of Mechanical Engineering, University of Jinan, Jinan
来源
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2020年 / 28卷 / 12期
关键词
Dimensional coupling; Multi-point measurement principle; Piezoelectric quartz; Six-axis force sensor; Spoke;
D O I
10.37188/OPE.20202812.2655
中图分类号
学科分类号
摘要
Aiming at the robot's feedback to the working environment for realizing automatic operation, a piezoelectric six-axis force sensor was designed. Specifically, an eight-fulcrum spoke six-axis force sensor structure combined with the principle of multipoint measurement was proposed herein. Quartz was employed as the piezoelectric material in the force-sensing device. The advantage of such a sensor is its strong decoupling, light weight, large range, and high natural frequency. The parametric modeling of this sensor was carried out using the ANSYS finite element software. The measurement principle of the eight-fulcrum sensor's feasibility was verified through a six-axis force quasi-static simulation. Moreover, a quasi-static and dynamic calibration experimental platform was built to conduct the calibration experiment. The experimental results show that for the proposed sensor, the nonlinearity is less than 0.5%, inter-dimensional interference is more than 4%, and natural frequency is over 6 kHz. From the theoretical analysis and experimental results, we confirmed that the sensor structure could complete the six-axis force measurement and that the coupling between the dimensions was eliminated. The demand for dynamic measurement was thus fulfilled. The proposed sensor's structure provides the theoretical and design bases for the design of lightweight large range sensors, which is of important reference significance for the design and development of other types of piezoelectric six-axis force sensors. © 2020, Science Press. All right reserved.
引用
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页码:2655 / 2664
页数:9
相关论文
共 13 条
  • [1] WANG ZH J, WANG K, LIU X Y., Summarize of six-dimensional force sensor decoupling, Mechanical Engineering & Automation, 2, pp. 220-221, (2018)
  • [2] LI CH F, ZHANG CH, HU SH SH, Et al., Structure design and analysis of six-dimensional force sensor, Measurement & Control Technology, 39, 5, pp. 41-48, (2020)
  • [3] LI Y J, HAN B B, WANG G C, Et al., Decoupling algorithms for piezoelectric six-dimensional force sensor based on RBF neural network, Optics and Precision Engineering, 25, 5, pp. 1266-1271, (2017)
  • [4] LIU J, XU J L, LI M, Et al., Static sensitivity analysis of washer-type piezoelectric six-axis force sensor, Optics and Precision Engineering, 27, 4, pp. 901-910, (2019)
  • [5] WANG Y, ZHAO J, XIA Y, Et al., Optimization of supporting beams of piezoelectric omnidirectional accelerometer under stress constraint, Optics and Precision Engineering, 28, 8, pp. 1751-1760, (2020)
  • [6] REN Z J, ZHU X Y, ZHANG J., Research on micro-thrust measurement based on torsional effect of quartz wafer, Piezoelectrics & Acoustooptics, 42, 4, pp. 481-483, (2020)
  • [7] LI Y J, YANG C, WANG G C, Et al., Research on the parallel load sharing principle of a novel self-decoupled piezoelectric six-dimensional force sensor, ISA Transactions, 70, pp. 447-457, (2017)
  • [8] LI Y J, WANG G C, YANG X, Et al., Research on static decoupling algorithm for piezoelectric six axis force/torque sensor based on LSSVR fusion algorithm, Mechanical Systems and Signal Processing, 110, pp. 509-520, (2018)
  • [9] JIN L, JIA ZH Y, LIU W., Effect of contact stiffness between sheets and electrodes in piezoelectric force sensors, Journal of Mechanical Engineering, 52, 22, pp. 15-23, (2016)
  • [10] JIA ZH Y, JIN L, LIU W, Et al., Infiuence os sheet roughness on the sensitivity of piezoelectric force sensor, Proceeding of Institution of Mechanical Engineers, 233, 1, (2019)