Nickel film resistors as temperature sensitive components in pressure and temperature multifunction sensors

被引：0
|
作者：
Wang, Wei [1 ]
Liu, Xiao-Wei [1 ]
Wang, Xi-Lian [1 ]
Ma, Zhan [1 ]
机构：
[1] MEMS Cent., Harbin Inst. of Technol., Harbin 150001, China
来源：
Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology | 2001年 / 33卷 / 03期
关键词：
Pressure - Resistors - Sensitivity analysis - Temperature;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The nickel film resistors integrated in multifunction sensors as temperature sensitive components were introduced. The preparation and temperature property of resistor and the integration of the resistors in high temperature pressure sensors to produce multifunction sensors were described. The experimental results show that the sensors can work at an ambient temperature up to 200°C with high precision.
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页码：378 / 380
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