Analysis of polarized light reflection from surface defects on steel sheets and its application to a high-speed inspection technique

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作者
Res. Plan. and Administration Dept., JFE R and D Corp., 1-1 Minamiwatarida-cho, Kawasaki-ku, Kawasaki 210-0855 [1 ]
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| 1600年 / 870-876卷 / November 2004期
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摘要
Defects - Dielectric materials - Ellipsometry - Inspection - Light polarization - Surface phenomena
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