A Study of an Ultra-Precision CNC Polishing System

被引：0

作者：

Han, S.J. ^{[1
]}

Choi, J.K. ^{[1
]}

Lee, S.W. ^{[2
]}

Choi, H.Z. ^{[2
]}

机构：

[1] Ctr. for Robot Technol./Mfg., IAE Yongln, KyoungGi-Do 449-860

[2] Nano Machining Team, KITECH, IbJang-Myun 330-825

来源：

Key Engineering Materials | 2004年 / 257-258卷

关键词：

Corrective Polishing; Dwell Time; On-Machine Measurement;

D O I：

10.4028/www.scientific.net/kem.257-258.395

中图分类号：

学科分类号：

摘要：

For the design of an ultra-precision CNC polishing system including an on-machine measurement (OMM) system, a corrective polishing algorithm was studied. The unit removal profiles for various polishing conditions were calculated and tested. Using the results, the dwell time distributions and residual errors for a removal shape are analyzed. The corrective polishing algorithm was tested with various materials. The targets are a flat shape and an aspheric shape, with a form accuracy of 0.3μm (RMS) and a surface roughness of 10nm. We found that the corrective polishing method is effective for sub-micrometer level machining.

引用

页码：395 / 400

页数：5