Microscopic phase-shifting profilometry based on digital micromirror device technology

被引:0
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作者
Zhang, Chengping [1 ]
Huang, Peisen S. [1 ]
Chiang, Fu-Pen [1 ]
机构
[1] Department of Mechanical Engineering, State Univ. New York at Stony Brook, Stony Brook, NY 11794-2300, United States
来源
Applied Optics | 2002年 / 41卷 / 28期
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页码:5896 / 5904
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