Real-time particle deposition monitoring of operational cleanroom quality

被引：0

作者：

Agricola K. ^{[1
,2
]}

机构：

[1] Technology of Sense b.v., Enschede

[2] PO Box 101, Venlo

来源：

Journal of the IEST | 2016年 / 59卷 / 01期

关键词：

Contamination control; Monitoring operational quality cleanroom; Particle deposition; Real time monitoring of particle deposition;

D O I：

10.17764/1098-4321.59.1.40

中图分类号：

学科分类号：

摘要：

Real-time particle deposition monitoring is a new way to monitor the operational quality of a cleanroom. Up to now the performance of a cleanroom is often monitored with light-scattering airborne particle counters. These give valuable information on airborne particles, but no information on the potentially threatening macroparticles in a cleanroom. In this paper, particle deposition phenomena and ways to determine particle deposition are discussed. A real-time particle deposition monitor using holographic imaging of the witness plates in a sensing device is described. Some practical experiences with real-time particle deposition measurements are demonstrated. Real-time particle deposition monitoring can be a valuable method to control the operational quality of a cleanroom where personnel are working. © 2018 BMJ Publishing Group. All rights reserved.

引用

页码：40 / 52

页数：12

共 16 条

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