Automatic compensation method for beam drift in long-distance laser measurement

被引：0
|
作者：
Yang B.-H. [1 ]
Cai Y.-D. [1 ]
Wen Z.-X. [1 ]
Ling S.-Y. [1 ]
Fan K.-C. [1 ]
机构：
[1] College of Mechanical Engineering, Dalian University of Technology, Dalian
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2020年 / 28卷 / 11期
关键词：
Beam drift; BPNN-PID; Laser diode; Laser measurement; Long-distance measurements;
D O I：
10.37188/OPE.20202811.2393
中图分类号：
学科分类号：
摘要：
To improve the stability of LDs and reduce the laser beam drift in long-distance measurement, a BPNN-PID-based dual-mirror laser-beam drift compensation method was proposed. Two four-quadrant photodetectors, which were placed at the near and far ends of the measurement position, were employed to measure the laser beam drifts. Two 2D precision-angle mirror mounts integrated with two piezoelectric actuators were used to adjust the propagation direction of the laser beam. A model relating the laser beam drift and the angular variation of the angle mirror mounts was established. The angular variation was then fed back with the proposed BPNN-PID method based on the output of the laser beam drift detector, from which the laser beam drift can be automatically compensated. It was verified that the signal stabilities of a laser measurement system that was used for measuring the straightness and angular errors of linear stages improved from ±9 μm and ±5" without laser-beam drift compensation to ±3 μm and ±1.5" with laser-beam drift compensation over 15 minutes. © 2020, Science Press. All right reserved.
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页码：2393 / 2402
页数：9
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