Development of dimensional X-ray computed tomography

Recently, a strong need has arisen for a dimensional X-ray computed tomography system that is capable of dimensionalmeasurements. This is because the speedy realization of dimensional measurements for outward forms and inward forms on dense spatial points remarkably simplifies and accelerates production loop. However, although the image obtained via XCT describes the structure clearly and in great detail, dimensional metrology by means of XCT is not simple. The National Metrology Institute of Japan has been carrying out performance tests using gauges that include the gauges proposed in ISO10360. In this work, the magnification variation correction is carefully presented, and a maximum deviation of less than 5 μm is shown to be possible by means of the measurement of the forest phantom of 27 ruby spheres, the locations of which are calibrated by the coordinate measuring machine. © 2015, Fuji Technology Press. All rights reserved.