Microstructuring and doping of monocrystalline silicon with femtosecond and nanosecond laser pulses

被引：1
|
作者：
Wen, Cai [1 ]
Li, Xiaohong [1 ]
He, Xiaoqing [2 ]
Duan, Xiaofeng [2 ]
Qiu, Rong [1 ]
Liu, Dexiong [1 ]
Tang, Jinlong [1 ]
Hu, Sifu [1 ,3 ]
机构：
[1] School of Science, Joint Laboratory for Extreme Conditions Matter Properties, Southwest University of Science and Technology, Mianyang, China
[2] Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing, China
[3] School of Microelectronics and Solid-State Electronics, University of Electronic Science and Technology of China, Chengdu, China
来源：
Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2015年 / 27卷 / 02期
关键词：
Number: 11104226,11204250, Acronym: -, Sponsor: -;
D O I：
10.11884/HPLPB201527.024143
中图分类号：
学科分类号：
摘要：
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