Proximity sensing for polishing robot by using an optical sensing system of surface roughness sensor

被引:0
|
作者
Harada, Hiroshi
Kawano, Mitsuji
Yamaguchi, Teruo
Noda, Atsuhiko
机构
来源
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2002年 / 68卷 / 09期
关键词
Active sensing - Optical measurements;
D O I
10.2493/jjspe.68.1206
中图分类号
学科分类号
摘要
引用
收藏
页码:1206 / 1210
相关论文
共 50 条
  • [41] Feedback controlled infrared proximity sensing system
    Yang, Ming
    MEASUREMENT, 2015, 69 : 81 - 86
  • [42] Multitouch Touchless - A new Approach with Optical Proximity Sensing
    Freidank, Sebastian
    Detert, Markus
    Hirsch, Soeren
    2017 7TH IEEE INTERNATIONAL WORKSHOP ON ADVANCES IN SENSORS AND INTERFACES (IWASI), 2017, : 145 - 149
  • [43] Influence Factors of Optical Surface Roughness in Traditional Polishing Process
    Shen Li-Jun
    Wan Yong-Jian
    Meng Kai
    7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES, 2014, 9281
  • [44] Surface roughness of optical quartz substrate by chemical mechanical polishing
    段波
    周建伟
    刘玉岭
    孙铭斌
    张玉峰
    Journal of Semiconductors, 2014, 35 (11) : 172 - 176
  • [45] Surface multiplasmonics for optical sensing
    Swiontek, Stephen E.
    Pulsifer, Drew P.
    Lakhtakia, Akhlesh
    TRIBUTE TO H. JOHN CAULFIELD, 2013, 8833
  • [46] Surface roughness of optical quartz substrate by chemical mechanical polishing
    Duan Bo
    Zhou Jianwei
    Liu Yuling
    Sun Mingbin
    Zhang Yufeng
    JOURNAL OF SEMICONDUCTORS, 2014, 35 (11)
  • [47] Proximity and tactile sensing using a single MEMS sensor with photo- and strain sensitivities
    Yokoyama, Hokuto
    Kanashima, Takeshi
    Okuyama, Masanori
    Abe, Takashi
    Noma, Haruo
    Azuma, Teruaki
    Sohgawa, Masayuki
    IEEJ Transactions on Sensors and Micromachines, 2014, 134 (07) : 229 - 234
  • [48] Mobile robot navigation using the mathematical model of the sensing system
    Apolloni, B
    Moise, A
    SMC 2000 CONFERENCE PROCEEDINGS: 2000 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN & CYBERNETICS, VOL 1-5, 2000, : 2625 - 2630
  • [49] APS: Distributed air pollution sensing system on Wireless Sensor and Robot Networks
    Fu, Huai-Lei
    Chen, Hou-Chun
    Lin, Phone
    COMPUTER COMMUNICATIONS, 2012, 35 (09) : 1141 - 1150
  • [50] Strain Sensing using Flexible Surface Acoustic Wave Sensor
    Govindarajan, Rishikesh Srinivasaraghavan
    Rojas-Nastrucci, Eduardo
    Kim, Daewon
    SENSORS AND SMART STRUCTURES TECHNOLOGIES FOR CIVIL, MECHANICAL, AND AEROSPACE SYSTEMS 2020, 2020, 11379