Low-cost incremental registration method for measuring the surface topography of weak features

被引:0
作者
Fang, Changshuai [1 ,2 ]
Liu, Zhaoyang [3 ]
Wang, Qianwen [1 ,2 ]
Zhang, Xiaodong [1 ,2 ]
机构
[1] State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin,300072, China
[2] School of Precision Instruments and Optoelectronic Engineering, Tianjin University, Tianjin,300072, China
[3] Standard Optics Technology Tianjin Co., Ltd., Tianjin,300072, China
来源
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering | 2024年 / 53卷 / 07期
关键词
Compendex;
D O I
10.3788/IRLA20240082
中图分类号
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摘要
Absorption spectroscopy - Atomic spectroscopy - Automobile windshields - Coordinate measuring machines - Distance measurement - Emission spectroscopy - Flow rate - Flow velocity - Image registration - Infrared spectroscopy - Laser induced breakdown spectroscopy - Level measurement - Molecular spectroscopy - Phase measurement - Process monitoring - Size determination - Strain measurement - Velocity measurement
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