Fabrication and evaluation of nanometer-sized metal oxide structures on composite metal thin films using scanning near-field optical microscope

被引：0

作者：

Onuki, Teppei ^{[1
,2
]}

Watanabe, Yuuichi ^{[2
]}

Nishio, Keishi ^{[2
]}

Tsuchiya, Toshio ^{[2
]}

Tani, Toshirou ^{[3
]}

Tokizaki, Takashi ^{[1
]}

机构：

[1] Nanotechnology Research Institute, National Institute of AIST, Tsukuba, Ibaraki 305-8568, Japan

[2] Dept. of Mat. Sci. and Technology, Tokyo University of Science, 2641 Yamazaki, Noda, Chiba 278-8510, Japan

[3] Department of Applied Physics, Tokyo Univ. of Agric. and Technology, Koganei, Tokyo 184-8588, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 10期

关键词：

Composite materials - Metallic films - Nanotechnology - Optical microscopy - Oxidation - Semiconductor device manufacture - Semiconductor device structures - Thickness measurement - Titanium alloys - Transparency;

D O I：

10.1143/jjap.41.6256

中图分类号：

学科分类号：

摘要：

Nanometer-scale metal-oxide structures with optical transparency have been fabricated on metal films by anodic oxidation using a probe tip of a scanning near-field optical microscope (SNOM). We discuss the thickness and the optical transparency of the oxides depending on the bias voltage applied to samples for oxidation. For titanium (Ti) films, the thickness of the oxide increases up to 100 nm linearly with the bias voltage. For composite films consisting of titanium-aluminum (Ti-Al) and titanium-silver (Ti-Ag) layers, the bias-voltage dependence of the oxide thickness is altered at some bias voltages, which concur with those required for the oxidation of the upper Ti layers. Moreover, the oxides have been observed optically by the same SNOM as a transmission mode. The transmittance at the oxide increases with the growth of the oxides, because of the decrease of the thickness of the metal films due to the oxidation. The result also suggests that Ti-, Al- and Ag-oxides fabricated by this method are optically transparent.

引用

页码：6256 / 6263