Structure and tribological properties of MoS2/DLC multilayer films with different modulation periods

被引：0
|
作者：
He T. [1 ,2 ]
Wu Y. [1 ]
Xu J. [2 ]
Mu B. [3 ]
Chai L. [2 ]
Zhang X. [1 ,2 ]
Wang P. [2 ]
机构：
[1] State Key Laboratory of Advanced Processing and Recycling of Non-ferrous Metals, School of Materials Science and Engineering, Lanzhou University of Technology, Lanzhou, 730050, Gansu
[2] State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou, 730000, Gansu
[3] College of Petrochemical Technology, Lanzhou University of Technology, Lanzhou, 730050, Gansu
来源：
Wu, Youzhi (youzhiwu@163.com) | 1600年 / Science Press卷 / 37期
基金：
中国国家自然科学基金;
关键词：
Different modulation periods; Frction property; Mechanical properties; Microstructure; MoS[!sub]2[!/sub]/DLC multilayer film; Tribological properties;
D O I：
10.16078/j.tribology.2017.01.005
中图分类号：
学科分类号：
摘要：
A series of MoS2/diamond-like carbon (DLC) multilayer films with three different modulation periods (i.e. Λ of 54 nm, 30 nm and 18 nm) were deposited on silicon wafers (100) using a multi-target radio frequency magnetron sputtering system. The influence of modulation periods on the morphology, microstructure and mechanical properties of multilayer films were investigated with scanning electron microscope, Raman spectrometer, X-ray diffractometer, transmission electron microscope and nanoindentation. The lubricating properties of the films were investigated by the ball-on-disk friction tester in ambient atmosphere. Results show that the alternative deposition MoS2/DLC multilayer films effectively suppressed the growth of columnar structure in sputtered MoS2 and thus the produced films had compact structure. The hardness of multilayer films increased as the modulation period increased. Transmission analysis of cross-sectioned multilayer films revealed that the interface between layer was not smooth whereas the periodic structure was dense and well-defined. In addition, the thickness of modulation period was basically consistent with the initial set value. Compared with pure MoS2 film, the multilayer film with modulation period of 54 nm had better loadbearing capacity and elastic recovery capacity, and the corresponding hardness reached the highest value (7.15 GPa). Furthermore, the film exhibited the lowest friction coefficient (0.09) and wear rate of 1.34×10-7 mm3/(N·m) under a normal load of 5 N in ambient atmosphere (with relative humidity of about 30%). © 2017, Science Press. All right reserved.
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页码：35 / 43
页数：8
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