Raman spectroscopy analysis of excimer laser crystallized amorphous silicon films

被引：0
|
作者：
Dai, Y.B. [1 ]
Shen, H.S. [1 ]
Zhang, Z.M. [1 ]
Zhang, S.Q. [1 ]
Xu, Z.Y. [1 ]
Li, X.J. [1 ]
机构：
[1] Inst. of Microelectron. Technol., Shanghai Jiaotong Univ., Shanghai 200030, China
来源：
Shanghai Jiaotong Daxue Xuebao/Journal of Shanghai Jiaotong University | 2001年 / 35卷 / 06期
关键词：
Amorphous silicon film;
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学科分类号：
摘要：
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页码：947 / 950
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