Extraction of elastic modulus of porous ultra-thin low-k films by two-dimensional finite-element simulations of nanoindentation

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[1] [1,Okudur, O.O.

[2] Vanstreels, K.

[3] 1,De Wolf, I.

[4] Hangen, U.

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Okudur, O.O. (oguzhan.orkut.okudur@imec.be) | 1600年 / American Institute of Physics Inc.卷 / 119期

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