Process optimization for synthesis of high-quality graphene films by low-pressure chemical vapor deposition

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Department of Electrical Engineering, Pohang University of Science and Technology, Pohang, Gyeongbuk 790-784, Korea, Republic of [1 ]
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Jpn. J. Appl. Phys. | / 6 PART 2卷
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摘要：
Low pressure chemical vapor deposition
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