Error calibration and correction of mirror tilt in laser trackers

被引：4
作者：
Academy of Optical-electronics, Chinese Academy of Sciences, Beijing [1 ]
100094, China
机构：
[1] Academy of Optical-electronics, Chinese Academy of Sciences, Beijing
来源：
Guangxue Jingmi Gongcheng | / 5卷 / 1205-1212期
关键词：
Error correction; Geometric error; Laser tracker; Least square method; Mirror tilt error;
D O I：
10.3788/OPE.20152305.1205
中图分类号：
学科分类号：
摘要：
To improve the measuring accuracy of laser trackers, the geometric errors of a tracker were analyzed, and the error calibration and error correction methods for a tilted mirror in the tracker were explored. An error model for the titled mirror was established based on vector analysis and coordinate transformation, and the error correction formulation for geometric space coordinate of the tracker was deduced. Then, a high precision error calibration device was built based on a multi-mirror polygon, an adjustable reflected mirror and autocollimators. The calibration device was used to analyze the error calibration method, and the system simulations were used to research the influence of mirror tilt error on angle and coordinate measurement errors. The error calibration test shows that the mirror tilt error is 4″. The tested error was induced to the coordinate correction formulation, and the spatial length measurement errors of the system before and after correction were tested. The results indicate that the measuring error of the laser tracker decreases by about 2×10-6, which shows that the error calculation and error correction methods are effective. The method improves the measuring accuracy without changing the hardware structure of the system. ©, 2015, Chinese Academy of Sciences. All right reserved.
引用
收藏
页码：1205 / 1212
页数：7
相关论文
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  • [1] Estler W.T., Edmundson K.L., Peggs G.N., Et al., Large-scale metrology: an update, CIRP Annals-Manufacturing Technology, 51, 2, pp. 587-609, (2002)
  • [2] Ye Sh.H., Zhu J.G., Zhang Z.L., Et al., Status and development of large-scale coordinate measurement research, Acta Metrologica Sinica, 29, 4A, pp. 1-6, (2008)
  • [3] Zhang F.M., Qu X.H., Ye Sh.H., Uncertainty estimation of large-scale measurement for special fitting task, Opt. Precision Eng., 16, 11, pp. 2239-2243, (2008)
  • [4] Zhou W.H., Ding L., Wang Y.W., Et al., Application of bundle adjustment to accuracy evaluation of laser tracker, Opt. Precision Eng., 20, 4, pp. 851-857, (2012)
  • [5] Loser R., Kyle S., Alignment and Field Check Procedures for the Leica Laser Tracker LTD 500, pp. 1-4, (1999)
  • [6] Muralikrishnan B., Sawyer D., Blackburn C., Et al., ASME B89.4.19 performance evaluation tests and geometric misalignments in laser trackers, Journal of Research of the National Institute of Standards and Technology, 114, 1, pp. 21-35, (2009)
  • [7] Conte J., Santolaria J., Majarena A.C., Et al., Identification and kinematic calculation of laser tracker errors, The Manufacturing Engineering Society International Conference: MESIC, pp. 379-387, (2013)
  • [8] Wang Y.W., Key techniques of optoelectronic tracking measurement system for space target, (2011)
  • [9] Lin J.R., Zhu J.G., Zhang H.L., Et al., Field evaluation of laser tracker angle measurement error, Chinese Journal of Scientific Instrument, 33, 2, pp. 463-468, (2012)
  • [10] Zhang Z.L., Zhou W.H., Lao D.B., Et al., Research and development of the laser tracker measurement system, Proceedings of the Eighth International Symposium on Precision Engineering Measurements and Instrumentation, pp. 87593Z1-87593Z7, (2012)
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