A compact nano manipulator based on an atomic force microscope coupling with a scanning electron microscope or an inverted optical microscope

被引：4
|
作者：
Iwata, Futoshi [1 ]
Mizuguchi, Yuya [1 ]
Ko, Hideyuki [1 ]
Ushiki, Tatsuo [2 ]
机构：
[1] Department of Mechanical Engineering, Faculty of Engineering, Shizuoka University, Hamamatsu, 432-8561, Japan
[2] Division of Microscopic Anatomy and Bio-imaging, Graduate School of Medical and Dental Sciences, Niigata University, Niigata, 951-8510, Japan
来源：
Journal of Micro-Nano Mechatronics | 2013年 / 8卷 / 01期
关键词：
D O I：
10.1007/s12213-013-0063-7
中图分类号：
学科分类号：
摘要：
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页码：25 / 32
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