Dual-mode thin film bulk acoustic wave resonator and filter

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作者：
Zou, Yang [1 ]
Nian, Laixia [1 ]
Cai, Yao [1 ]
Liu, Yan [1 ]
Tovstopyat, Alexander [1 ]
Liu, Wenjuan [1 ]
Sun, Chengliang [1 ]
机构：
[1] Institute of Technological Sciences, Wuhan University, Wuhan, Hubei,430072, China
来源：
Journal of Applied Physics | 2020年 / 128卷 / 19期
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