MEMS applications of NiTi based shape memory alloys: A review

被引：1

作者：

Mehrpouya M. ^{[1
]}

Bidsorkhi H.C. ^{[2
,3
]}

机构：

[1] Department of Mechanical and Aerospace Engineering, Sapienza University of Rome, Via Eudossiana 18, Rome

[2] Research Center for Nanotechnology Applied to Engineering of Sapienza (CNIS), Sapienza University of Rome, Rome

[3] Department of Astronautic, Electrical and Energetic Engineering, Sapienza University of Rome, via Eudossiana 18, Rome

来源：

Micro and Nanosystems | 2016年 / 8卷 / 02期

关键词：

Alloys; MEMS; NiTi; SMAs; Thin films; TWSME;

D O I：

10.2174/1876402908666161102151453

中图分类号：

学科分类号：

摘要：

Shape Memory Alloys (SMAs), famous class of smart materials with unique functional and intelligence properties, have attracted much attention in recent decades. These materials offer a potential solution for microstructure devices due to their high mechanical performances, high power to weight ratio, large deformation, biocompatibility, etc. Nickel-Titanium (NiTi) is the most applied SMAs thin film due to its high recoverable strain and massive forces. Therefore, these high-performance materials are able to make microactuators in Micro-Electro-Mechanical System (MEMS). This paper investigates the recent development of material processing approaches for NiTi thin films and introduces various types of MEMS applications such as microvalves, micropumps, microgrippers, microsensors, etc. © 2016 Bentham Science Publishers.

引用

页码：79 / 91

页数：12

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