Topology optimized RF MEMS switches

被引：0
|
作者：
Philippine, M.A. [1 ]
Zareie, H. [2 ]
Sigmund, O. [3 ]
Rebeiz, G.M. [2 ]
Kenny, T.W. [1 ]
机构：
[1] Stanford University, Stanford, CA, United States
[2] UC San Diego, San Diego, CA, United States
[3] Technical University of Denmark, Lyngby, Denmark
来源：
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013 | 2013年
关键词：
Capacitive switch - MEMS design - MEMSDevices - Performance and reliabilities - RF-MEMS switches;
D O I：
6627308
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：2477 / 2480
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