Development of an environmental TEM and its applications

被引：0

作者：

Yaguchi T. ^{[1
]}

Watabe A. ^{[1
]}

Nagakubo Y. ^{[1
]}

Matsumoto H. ^{[1
]}

Kakibayashi H. ^{[1
]}

Kamino T. ^{[2
]}

机构：

[1] Nanotechnology Products Business Group, Hitachi High-Technologies Corp., Hitachinaka, Ibaraki, 312-8504, 882, Ichige

[2] Fuel Cell Nanomaterals Center, University of Yamanashi, Koufu, Yamanashi, 400-8511, 4-3-11, Takeda

来源：

Journal of the Vacuum Society of Japan | 2011年 / 54卷 / 04期

关键词：

Optical instrument lenses;

D O I：

10.3131/jvsj2.54.280

中图分类号：

学科分类号：

摘要：

For the characterization of the materials under a wide range of different ambient atmospheres and temperatures, we have developed an environmental TEM based on a 300 kV TEM, which employs high resolution objective lens. The microscope column is differentially pumped using three sets of high speed turbo molecular pumps with a pumping speed of 260 l/s. In order to improve the experimental capability of the environmental TEM, we have developed an environmental cell. The developed environmental cell is a side entry type with a built-in specimen heater of a spirally shaped tungsten wire, which is used as the standard heater for high temperature specimen heating in principle. The developed holder is possible to use in the high resolution objective lens pole-piece. The gas pressure inside the environmental cell can be continuously controlled from 10-5 Pa to atmospheric pressure in the normally evacuated specimen chamber.

引用

页码：280 / 284

页数：4

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