Fibre-optic leak techniques

被引：0
|
作者：
Kingsford, Kenji A.
机构：
来源：
European Semiconductor | 2000年 / 22卷 / 06期
关键词：
Contamination - Fiber optics - Hazardous materials - Risk management - Silicon wafers;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Contamination, via leaks, is the greatest single factor affecting wafer yield. Leak detection technology can reduce risks of contamination and exposure to hazardous chemicals. Fiber-optic leak detection techniques are discussed to solve this problem.
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收藏
页码：33 / 34
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