Mechanical property and modal analysis of ultra-thin mirrors

被引：0
作者：
Yuan Y. [1 ]
Gu C. [1 ]
Yan G. [1 ]
Fang F. [1 ]
机构：
[1] Centre of MicroNano Manufacturing Technology, State Key Laboratory of Precision Measuring Technology & Instruments, School of Precision Instrument & Opto-Electronics Engineering, Tianjin University, Tianjin
来源：
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2018年 / 39卷 / 06期
关键词：
Mechanical property; Modal analysis; Ultra-thin mirror;
D O I：
10.19650/j.cnki.cjsi.J1803158
中图分类号：
学科分类号：
摘要：
Ultra-thin mirrors are widely used in the fields of micro sensors, instrument miniaturization and gravity measurement. However, the effect of mirror material parameters on its mechanical properties and modal variation still remains unidentified due to difficulties of processing, fixing and so on. The mechanical properties of ultra-thin mirrors are studied by using modal simulation based on finite element method. The mechanical deformation of ultra-thin mirrors is also focused under different stress conditions. The relationship between the natural frequency of ultra-thin mirrors and the material density, Young's modulus and Poisson's ratio is built by employing orthogonal experimental design method. The results show that the mechanical deformation of the mirror is largely determined by the force impact position. Meanwhile, both the density and Poisson's ratio behave approximately negative proportion with the natural frequency of the mirrors, the young's modulus is approximately proportional to the natural frequency. © 2018, Science Press. All right reserved.
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页码：64 / 72
页数：8
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