An inchworm-type multi-DOF stage

被引：0
作者：
机构：
[1] Faculty of Engineering, Aichi Institute of Technology, Toyota 470-0392, 1247, Yachigusa, Yakusa-cho
来源：
| 2013年 / Institute of Electrical Engineers of Japan卷 / 133期
基金：
日本学术振兴会;
关键词：
Inchworm; Multi-DOF actuator; Piezoelectric actuator; Stewart-platform;
D O I：
10.1541/ieejeiss.133.849
中图分类号：
学科分类号：
摘要：
This paper describes an inchworm-type multi-degree-of-freedom stage, which consists of a platform, linear links and a base. The stage is based on a self-propelled Stewart-platform. We use six stacked-type piezoelectric actuators as the linear links. Six electromagnets are used in the stage. The electromagnets connect the linear links to the base and to the platform. This structure enables the Stewart-platfom to move on a surface by using the principle of an inchworm. The platform supported by the linear links is also operated by the principle of an inchworm, which enables the platform to rotate in the tilt directions. While the electromagnets fix the linear actuators on the base, the platform of the proposed stage realizes a precise multi-DOF motion. Design, principle, and control signals are described. The position and orientation of the moving platform is measured, and some experimental results indicate the feasibility of the proposed stage. The mechanism is effective for a precise positioning system which has a wide working area. © 2013 The Institute of Electrical Engineers of Japan.
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页码：849 / 855
页数：6
相关论文
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