Research on tunable filter based on micro-ring resonators

被引：0

作者：

Wu D. ^{[1
]}

Wu Y. ^{[1
]}

Wang Y. ^{[1
]}

An J. ^{[1
]}

Hu X. ^{[1
]}

机构：

[1] State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing

来源：

Guangxue Xuebao/Acta Optica Sinica | 2016年 / 36卷 / 01期

关键词：

Electro-optic modulators; Integrated optics; Multiplexing; Optical devices; Resonators; Slab waveguides; Tunable filters;

D O I：

10.3788/AOS201636.0123002

中图分类号：

学科分类号：

摘要：

Deep ultraviolet photolithography and inductively coupled plasma etching processes are adopted to fabricate the filters based on silicon-on-insulator micro-ring resonators, and the radius is only 5 μm. A fourchannel optical add-drop multiplexer based on single micro-ring is fabricated, and the size of the device is only 3000 μm×500 μm. The test results show that the device can perfectly realize the upload and download functions. The free spectral range is about 19.6 nm and the maximum extinction ratio is 19.76 dB. Meanwhile, a reconfigurable optical add-drop multiplexer based on dual racetrack micro-ring resonator is optimally designed and fabricated. The adjacent crosstalks of the two kinds of optical add-drop multiplexer based on single micro-ring and dual racetrack micro-ring respectively are tested, and the maximum adjacent crosstalks are -11.94 dB and -20.04 dB, respectively. Because there is no cross-section between the add-drop channels and the backbone in dual racetrack optical add-drop multiplexer, the adjacent crosstalk is apparently less than the single micro-ring optical add-drop multiplexer. PIN junction modulator based on dual racetrack micro-ring resonators is designed and fabricated. When the added voltage reaches 1.6 V, the resonant peak has a blue shift of 0.78 nm, finally the test results are analyzed. © 2016, Chinese Laser Press. All right reserved.

引用

页数：8

共 19 条

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