Interferometric atomic force microscope: Design, metrological properties and application measurements

被引：0

作者：

Vorbringer-Dorozhovets, Nataliya ^{[1
]}

Manske, Eberhard ^{[1
]}

Jäger, Gerd ^{[1
]}

机构：

[1] Institut für Prozessmess- und Sensortechnik, Fakultät für Maschinenbau, Technische Universität Ilmenau, PF 100565, Ilmenau,D-98684, Germany

来源：

Technisches Messen | 2018年 / 85卷 / s1期

关键词：

Probes - Interferometers - Atomic force microscopy - Microscopes - Interferometry;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

This article presents the special properties, operating mode, design, metrological properties, important application measurements of the interferometric atomic force microscope. The interferometric atomic force microscope serves as a probing system in the nanopositioning and nanomeasuring machine NMM-1. The main feature of the interferometric atomic force microscope is the position detector - the combined probe measuring system, which allows the simultaneous detection of torsion, bending and position of the cantilever by means of optical lever and interferometer. In this work the principle of simultaneous detection of vertical and angular position of the probe by means of an interferometer and an optical lever is explained, the optical arrangement is presented and afterwards the accomplished dimensioning of the position detector is discussed. This article deals also with metrological properties of interferometric atomic force microscope, calibration of its probing system and particularly with the uncertainty analysis of an example measurement. © 2018 Oldenbourg Wissenschaftsverlag GmbH, Rosenheimer Str. 145, 81671 München.

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