A device for localized measurement of small particles with electrode-integrated small pores

被引：0

作者：

Takeshiro Y. ^{[1
]}

Usami N. ^{[1
]}

Okamoto Y. ^{[1
]}

Takada T. ^{[2
]}

Higo A. ^{[3
]}

Ikeno R. ^{[3
]}

Washizu N. ^{[2
]}

Asada K. ^{[3
]}

Mita Y. ^{[1
]}

机构：

[1] Department of Electrical Engineering and Information Systems, University of Tokyo, 7-3-1, Hongo, Bunkyo-ku, Tokyo

[2] Advantest Corporation, 1-6-2, Marunouchi, Chiyoda-ku, Tokyo

[3] VLSI Design and Education Center, University of Tokyo, 2-11-16, Yayoi, Bunkyo-ku, Tokyo

来源：

IEEJ Transactions on Sensors and Micromachines | 2019年 / 139卷 / 08期

关键词：

Anisotropic etching; Coulter counter; DRIE; Small pore;

D O I：

10.1541/ieejsmas.139.271

中图分类号：

学科分类号：

摘要：

In this article, we propose a device with multiple small pores, which are locally integrated with individual electrodes. The application is particle measurement using Coulter’s method, using the integrated local electrode on each pore. Coulter’s particle counter can achieve high resolution measurement; however, the method had sensitivity and throughput tradeoff problem in reducing measurable particle size. The system can locally observe current around the pore and thereby parallel measurement becomes possible while keeping high sensitivity. The fabricated pore size were 400 nm, 1.0 µm, and 1.5 µm. Spontaneous water flow was achieved with 1.5 µm device, and current dip attributable to Coulter’s principle was observed. © 2019 The Institute of Electrical Engineers of Japan.

引用

页码：271 / 276

页数：5

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