Calibration of fizeau wavelength-tuned phase-shifting interferometer based on two-frame differential average phase-shifting algorithm

被引:0
|
作者
Wen, Gang [1 ,2 ]
Su, Dongqi [1 ,2 ]
Sui, Yongxin [1 ]
Yang, Huaijiang [1 ]
Kong, Fanlin [1 ,2 ]
机构
[1] State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, Jilin 130033, China
[2] University of Chinese Academy of Sciences, Beijing 100049, China
来源
Zhongguo Jiguang/Chinese Journal of Lasers | 2013年 / 40卷 / 11期
关键词
21;
D O I
10.3788/CJL201340.1108004
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [31] Algorithm immune to tilt phase-shifting error for phase-shifting interferometers
    Chen, Mingyi
    Guo, Hongwei
    Wei, Chunlong
    Applied Optics, 2000, 39 (22): : 3894 - 3898
  • [32] Two-frame phase-shifting interferometry for retrieval of smooth surface and its displacements
    Muravsky, L. I.
    Ostash, O. P.
    Kmet', A. B.
    Voronyak, T. I.
    Andreiko, I. M.
    OPTICS AND LASERS IN ENGINEERING, 2011, 49 (03) : 305 - 312
  • [33] Random two-frame phase-shifting interferometry via minimization of coefficient of variation
    Cheng, Zhongtao
    Liu, Dong
    Zhang, Lei
    APPLIED PHYSICS LETTERS, 2019, 115 (12)
  • [34] Algorithm immune to tilt phase-shifting error for phase-shifting interferometers
    Chen, MY
    Guo, HW
    Wei, CL
    APPLIED OPTICS, 2000, 39 (22) : 3894 - 3898
  • [35] Polarization phase-shifting Fizeau interferometer with a cyclic path optical configuration
    Chatterjee, Sanjib
    Kumar, Y. Pavan
    OPTICAL ENGINEERING, 2009, 48 (11)
  • [36] 600-mm aperture simultaneous phase-shifting Fizeau interferometer
    Zhu, Wenhua
    Chen, Lei
    Yang, Ying
    Zhang, Rui
    Zheng, Donghui
    Han, Zhigang
    Li, Jinpeng
    OPTICS AND LASER TECHNOLOGY, 2018, 104 : 26 - 32
  • [37] Fast and accurate wavefront reconstruction in two-frame phase-shifting interferometry with unknown phase step
    Chen, Zhongtao
    Liu, Dong
    OPTICS LETTERS, 2018, 43 (13) : 3033 - 3036
  • [38] The Influence of Phase-shifting Algorithms on the Instrument Transfer Function in a Fizeau Interferometer
    Zhang, Xu
    Lu, Qi
    Xu, Tianzhu
    Sun, Ying
    Liu, Shijie
    Silin, Dmitry
    Kozhevatov, Ilya
    Khazanov, Efim
    OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS IX, 2022, 12319
  • [39] Model-based phase-shifting interferometer
    Liu, Dong
    Zhang, Lei
    Shi, Tu
    Yang, Yongying
    Chong, Shiyao
    Miao, Liang
    Huang, Wei
    Shen, Yibing
    Bai, Jian
    OPTIFAB 2015, 2015, 9633
  • [40] Two-frame random phase-shifting interferometry immune to the influence of tilted phase-shift
    Zhang, Hangying
    Zhang, Weihao
    Meng, Kai
    Lou, Peihuang
    OPTICS LETTERS, 2024, 49 (19) : 5615 - 5618