Influence of conditions of the InSb monocrystals chemical processing on a surface composition and structure

被引:0
|
作者
Kiseleva, L.V. [1 ]
Lopukhin, A.A. [1 ]
Mezin, Yu.S. [1 ]
Savostin, A.V. [1 ]
Vlasov, P.V. [1 ]
Vyatkina, O.S. [1 ]
机构
[1] Orion RandP Association, Inc., 9 Kosinskaya str., Moscow,111538, Russia
来源
Applied Physics | 2015年 / 2015-January卷 / 05期
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摘要
Oxidation
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页码:84 / 89
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