Preparation of semi-insulating material by annealing undoped InP

被引：0
|
作者：
Zhao, Youwen [1 ]
Dong, Hongwei [1 ]
Jiao, Jinghua [1 ]
Zhao, Jianqun [1 ]
Lin, Lanying [1 ]
Sun, Niefeng [1 ]
Sun, Tongnian [1 ]
机构：
[1] Mat. Sci. Cent., Inst. of Semi-conduct., Chinese Acad. of Sci., Beijing 100083, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2002年 / 23卷 / 03期
关键词：
Deep defect - Iron phosphide - Pure phosphorus - Semi insulating indium phosphide;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：285 / 289
相关论文
共 50 条
  • [1] Effect of annealing conditions on the uniformity of undoped semi-insulating InP
    Kainosho, K
    Ohta, M
    Uchida, M
    Nakamura, M
    Oda, O
    JOURNAL OF ELECTRONIC MATERIALS, 1996, 25 (03) : 353 - 356
  • [2] Defects in undoped semi-insulating InP
    Chen Yan
    Guo Xin
    SELECTED PAPERS FROM CONFERENCES OF THE PHOTOELECTRONIC TECHNOLOGY COMMITTEE OF THE CHINESE SOCIETY OF ASTRONAUTICS: OPTICAL IMAGING, REMOTE SENSING, AND LASER-MATTER INTERACTION 2013, 2014, 9142
  • [3] Deep centers in undoped semi-insulating InP
    Fang, ZQ
    Look, DC
    Uchida, M
    Kainosho, K
    Oda, O
    JOURNAL OF ELECTRONIC MATERIALS, 1998, 27 (10) : L68 - L71
  • [4] Reproducibility in the fabrication of undoped semi-insulating InP
    Uchida, M
    Kainosho, K
    Ohta, M
    Oda, O
    1996 EIGHTH INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS, 1996, : 43 - 46
  • [5] Deep centers in undoped semi-insulating InP
    Z. -Q. Fang
    D. C. Look
    M. Uchida
    K. Kainosho
    O. Oda
    Journal of Electronic Materials, 1998, 27 : L68 - L71
  • [6] Fabrication of undoped semi-insulating InP by multiple-step wafer annealing
    Uchida M.
    Kainosho K.
    Ohta M.
    Oda O.
    Journal of Electronic Materials, 1998, 27 (1) : 8 - 11
  • [7] Fabrication of undoped semi-insulating InP by multiple-step wafer annealing
    Uchida, M
    Kainosho, K
    Ohta, M
    Oda, O
    JOURNAL OF ELECTRONIC MATERIALS, 1998, 27 (01) : 8 - 11
  • [8] Semi-insulating InP through wafer annealing
    Oda, O
    Uchida, M
    Kainosho, K
    Ohta, M
    Warashina, M
    Tajima, M
    1997 INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS - CONFERENCE PROCEEDINGS, 1997, : 404 - 407
  • [9] ENCAPSULATION AND ANNEALING STUDIES OF SEMI-INSULATING INP
    FARLEY, CW
    KIM, TS
    STREETMAN, BG
    LAUREAU, RT
    WILLIAMS, P
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (09) : C406 - C406
  • [10] STUDY OF THE INFLUENCE OF THE PHOSPHORUS PRESSURE ON THE PREPARATION OF NOMINALLY UNDOPED SEMI-INSULATING INP WAFERS
    KIPFER, P
    LINDOLF, J
    HOFMANN, D
    MULLER, G
    JOURNAL OF APPLIED PHYSICS, 1991, 69 (07) : 3860 - 3864
12345