Low dielectric nanoporous composites based on epoxy-based POSS modification: Effect of microstructure on dielectric properties

被引：0

作者：

Li X. ^{[1
]}

Liu X. ^{[1
]}

He R. ^{[1
]}

Liu H. ^{[1
]}

Wang F. ^{[1
]}

Meng S. ^{[1
]}

机构：

[1] Chongqing Key Laboratory of New Materials for Catalysis and Environment, College of Environment and Resources, Chongqing Technology and Business University, Chongqing

来源：

Fuhe Cailiao Xuebao/Acta Materiae Compositae Sinica | 2024年 / 41卷 / 02期

基金：

中国国家自然科学基金;

关键词：

composite; crosslinking density; dielectric constant; epoxy resin; epoxy-based POSS; free volume;

D O I：

10.13801/j.cnki.fhclxb.20230812.001

中图分类号：

学科分类号：

摘要：

With the rapid development of ultra-large-scale integrated circuits, micro-integrated high-density semiconductor components urgently require low dielectric materials. In this work, epoxy sesquisiloxane (EOVS) with cage structure was synthesized and blended with epoxy resin E51 to obtain the nanoporous EOVS/E51composite. As shown by SEM, EOVS nanoparticles are uniformly dispersed in the E51 matrix. With the increase of EOVS, the nanopores introduced by its cage structure make the free volume of EOVS/E51 composite increase and the density of polarized molecules per unit volume decrease, so that the dielectric constant decreases from 4.21 to 2.51 (1 MHz) when the EOVS content is 15wt%. However, the epoxy groups on EOVS provide new reaction sites, so the crosslink density of the EOVS/E51 composite system increases with the increase of EOVS, and the free volume of the composite decreases and the dielectric constant turns to increase when the EOVS content reaches 20wt%. In addition, the hydrophobicity of the Si− O− Si bond of EOVS enhances the moisture resistance of EOVS/E51 composites, while the thermal stability of the inorganic backbone and the nano-toughening effect lead to a significant increase in the heat and impact resistance of the composite, which is promising for applications in microelectronics. © 2024 Beijing University of Aeronautics and Astronautics (BUAA). All rights reserved.

引用

页码：702 / 711

页数：9

共 29 条

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