Micropipe healing in liquid phase epitaxial growth of SiC

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作者：
Yakimova, R. [1 ]
Syväjärvi, M. [1 ]
Rendakova, S. [2 ]
Dimitriev, V.A. [2 ,3 ]
Henry, A. [1 ]
Janzén, E. [1 ]
机构：
[1] Dept. of Phys. and Msrmt. Technology, Linköping University, SE-581 83 Linköping, Sweden
[2] TDI, Inc., 8660 Dakota Drive, Gaithersburg, MD 20877, United States
[3] Howard University, MSRCE, Washington, DC, United States
来源：
Materials Science Forum | 2000年 / 338卷
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