Monte Carlo simulation of Cu thin film growth by magnetron sputtering

被引：0
|
作者：
机构：
[1] Liu, Zuli
[2] Zhang, Xuefeng
[3] Yao, Kailun
[4] Huang, Yunmi
来源：
Liu, Z. (zlliu@hust.edu.cn) | 2005年 / Science Press卷 / 25期
关键词：
Thin films;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Kinetic Monte Carlo simulation of Cu thin film growth
    Zhang, PF
    Zheng, XP
    Wu, SP
    Liu, J
    He, DY
    VACUUM, 2004, 72 (04) : 405 - 410
  • [2] Kinetic Monte Carlo simulation of thin film growth
    Peifeng Zhang
    Xiaoping Zheng
    Deyan He
    Science in China (Series G), 2003, 46 : 610 - 618
  • [3] Kinetic Monte Carlo simulation of thin film growth
    张佩峰
    郑小平
    贺德衍
    Science in China(Series G), 2003, (06) : 610 - 618
  • [4] Kinetic Monte Carlo simulation of thin film growth
    Zhang, PF
    Zheng, XP
    He, DY
    SCIENCE IN CHINA SERIES G-PHYSICS MECHANICS & ASTRONOMY, 2003, 46 (06): : 610 - 618
  • [5] Application of computer: Monte Carlo simulation of thin film growth
    Zhang, Pei-Feng
    Wu, Suo-Ping
    Zheng, Xiao-Ping
    Liu, Jun
    He, De-Yan
    Yue, Jin
    Lanzhou Daxue Xuebao/Journal of Lanzhou University, 2003, 39 (06):
  • [6] Monte Carlo simulation of thin film growth with lattice defects
    Kaneko, Y
    Hiwatari, Y
    Ohara, K
    Murakami, T
    JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 2000, 69 (11) : 3607 - 3613
  • [7] Monte-Carlo simulation of thin film growth process
    Wei, Helin
    Liu, Zuli
    Yao, Kailun
    Wuli Xuebao/Acta Physica Sinica, 2000, 49 (04): : 791 - 796
  • [8] Monte-Carlo simulation of thin film growth process
    Wei, HL
    Liu, ZL
    Yao, KL
    ACTA PHYSICA SINICA, 2000, 49 (04) : 791 - 796
  • [9] Monte Carlo simulation of Cu thin films growth process
    Chen, L. (lchen@ustb.edu.cn), 1600, Chinese Ceramic Society (43):
  • [10] Monte Carlo simulation of the transport of atoms in DC magnetron sputtering
    Mahieu, S
    Buyle, G
    Depla, D
    Heirwegh, S
    Ghekiere, P
    De Gryse, R
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2006, 243 (02): : 313 - 319
12345