Synthesis and characterization of graphene thin films by pulsed laser deposition

被引:0
作者
Wang, Jin [1 ,2 ,3 ]
Yu, Jian [3 ]
Xiong, Zhengwei [2 ,3 ]
Yin, Hongbu [3 ]
Wang, Xuemin [3 ]
Cao, Linhong [1 ,2 ]
Wu, Weidong [2 ,3 ]
机构
[1] School of Materials Science and Engineering, Southwest University of Science and Technology, Mianyang
[2] Laboratory for Extreme Conditions Matter Properties, Southwest University of Science and Technology, Mianyang
[3] Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang
来源
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2015年 / 35卷 / 08期
关键词
AFM; Graphene; HRTEM; PLD;
D O I
10.13922/j.cnki.cjovst.2015.08.19
中图分类号
学科分类号
摘要
Graphene with two-dimensional structure has excellent properties, which has become research focus on chemistry, physics, materials science and other fields in recent years. In this paper, the graphene thin films were grown by pulsed laser deposition (PLD) with pyrolytic graphite as the carbon source on Cu (111) substrate at 2.0×10-6 Pa and/or at 2.0×10-1 Pa of H2. The influence of the deposition conditions, including but not limited to the substrate temperature, hydrogen partial pressure and laser pulse duration, on the microstructures and crystallinity was investigated with atomic force microscopy (AFM) and high resolution transmission electron microscopy (HRTEM), selected area electron diffraction and Raman spectroscopy. The preliminary results show that the substrate temperature and H2 partial pressure have a major impact on the crystallinity of graphene films. To be specific, in the temperature ranging from 400 to 600℃, high quality graphene films were grown at 400℃ and a low pressure of H2. ©, 2015, Science Press. All right reserved.
引用
收藏
页码:1023 / 1027
页数:4
相关论文
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