Blistering of silicon crystals by low keV hydrogen and helium ions

被引:0
|
作者
Qian, C.
Terreault, B.
机构
来源
| 1600年 / American Institute of Physics Inc.卷 / 90期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [31] Onset of blistering in hydrogen-implanted silicon
    Huang, LJ
    Tong, QY
    Chao, YL
    Lee, TH
    Martini, T
    Gösele, U
    APPLIED PHYSICS LETTERS, 1999, 74 (07) : 982 - 984
  • [32] Blistering and splitting in hydrogen-implanted silicon
    Ntsoenzok, E
    Assaf, H
    Ashok, S
    Semiconductor Defect Engineering-Materials, Synthetic Structures and Devices, 2005, 864 : 405 - 409
  • [34] Multiple ionization of diatomic molecules in collisions with 50-300-keV hydrogen and helium ions
    Siegmann, B
    Werner, U
    Kaliman, Z
    Roller-Lutz, Z
    Kabachnik, NM
    Lutz, HO
    PHYSICAL REVIEW A, 2002, 66 (05): : 9
  • [35] Influence of heavy ions pre-damage on the blistering and helium bubble in tungsten under helium ions irradiation
    Xia, Tongjun
    Liu, Jia
    Tang, Chunjuan
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2024, 548
  • [36] Surface blistering of low-temperature annealed hydrogen and helium co-implanted silicon and its application to splitting of bonded wafer substrates
    Hurley, R. E.
    Wadsworth, H.
    Gamble, H. S.
    VACUUM, 2007, 81 (10) : 1207 - 1212
  • [37] Hydrogen blistering of silicon: Progress in fundamental understanding
    Terreault, Bernard
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2007, 204 (07): : 2129 - 2184
  • [38] Effect of 800 keV argon ions pre-damage on the helium blister formation of tungsten exposed to 60 keV helium ions
    Chen, Zhe
    Han, Wenjia
    Yu, Jiangang
    Zhu, Kaigui
    JOURNAL OF NUCLEAR MATERIALS, 2016, 472 : 110 - 117
  • [39] BOZON ION DOPING OF SILICON-CRYSTALS IRRADIATED BY HELIUM-IONS
    KOVALYOV, GG
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1979, (08): : 110 - 110
  • [40] Mass flow facilitates tungsten blistering under 60 keV helium ion implantation
    Han, Wenjia
    Yu, Jiangang
    Chen, Zhe
    Lu, Guanghong
    Zhu, Kaigui
    NUCLEAR FUSION, 2017, 57 (07)