Demonstration of dielectric measurement using a probe-backside reflection method up to 300 GHz

被引：0

作者：

Sakamaki, Ryo ^{[1
,3
]}

Horibe, Masahiro ^{[1
]}

Yoshida, Manabu ^{[2
]}

Tsurumi, Takaaki ^{[3
]}

机构：

[1] Research Institute of Physical Measurement, National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki,305-0035, Japan

[2] Sensing System Research Center, National Institute of Advanced Industrial Science and Technology, 1-1-1 Umezono, Tsukuba, Ibaraki,305-0035, Japan

[3] School of Materials and Chemical Technology, Tokyo Institute of Technology, 2-12-1 Ookayama, Tokyo, Meguro,152-8550, Japan

来源：

Japanese Journal of Applied Physics | 2019年 / 58卷 / SL期

关键词：

Compendex;

D O I：

SLLE02

中图分类号：

学科分类号：

摘要：

Probes

引用