Study of the mechanical behavior of plasma-deposited silica films on polycarbonate and steel

被引：0

作者：

机构：

[1] Hofrichter, A.

[2] Constantinescu, A.

[3] Benayoun, S.

[4] Bulkin, P.

[5] Drévillon, B.

来源：

Hofrichter, A. | 2012年 / American Inst of Physics, Woodbury, NY, United States卷 / 18期

关键词：

Elastic moduli - Finite element method - Plasma enhanced chemical vapor deposition - Polycarbonates - Protective coatings - Silica - Silicon - Stainless steel - Strain - Stress analysis - Stress concentration - Vickers hardness testing;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Amorphous hydrogenated silica films were plasma-deposited on polycarbonate, stainless steel, and silicon. Macroindentation tests and finite element modeling were performed to study the mechanical properties of the films. About 4 GPa was found to be the yield limit of the plasma-deposited films.

引用