Investigation of VO2directly deposited on a glass substrate using RF sputtering for a smart window

In this study, a VO(2)thin film was directly deposited on a soda-lime glass by reactive RF sputtering to investigate its potential application in smart windows. The VO(2)crystal structure is susceptible to changes in the oxygen density; to decrease this sensitivity, we fabricated a VO(2)thin film by increasing the RF sputtering power, rather than increasing the growth temperature. The orientation of VO(2)was changed from (011) to (100) by increasing the RF power from 100 to 180 W. This phenomenon can be explained using the enthalpy compensation and strain effect. The thin film clearly shows thermochromic characteristics in terms of drastic variation in infrared radiation at different temperatures based on the intrinsic transition property of VO2. Direct deposition of VO(2)thin film on a glass substrate using the high RF power sputtering method proposed in this study is recommended as a simple and low-cost method to add a self-temperature control function to smart windows.